CASINO V2.42—A Fast and Easy‐to‐use Modeling Tool for

Electron and ion beam equipment play a vital role in the semiconductor manufacturing and nanotechnology industries. For designing new and better electron and ion beam columns for use at the cutting edge of these technologies, accurate and sophisticated simulation software is indispensable, and the development and improvement of such software has been one of our company’s main objectives for The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new The aim of this paper is to present a new user‐friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron‐beam lithography. This version uses a new architecture that provides results twice as CASINO : A New Monte Carlo Code in C Language for Electron Beam Interaction —Part I: Description of the Program PIERRE HOVINGTON, DOMINIQUE DROUIN, RAYNALD GAUVIN Département de Génie Mécanique, Université de Sherbrooke, Sherbrooke, Québec, Canada SCANNING VOL. 19 1–14 (1997) Received December 29, 1995 [22,33] The electron beam conditions used in EPMA measurements were input into the CASINO [34] simulation software to estimate the electron interaction volume. The interaction volume diameter was Key words:Monte Carlo simulation software, scanning electron microscopy, BE line scan, X-ray line scan, E-beam lithography PACS: 02.70.Uu; 05.10.Lm; 07.05.Tp; 68.37.Hk; 85.40.Hp Introduction The motivation of this work was to provide an easy-to-use and accurate simulation program of electron Address for reprints: Dominique Drouin, Departement de´ g´enie electrique et g´ ´enie informatique The software was adapted to include the STEM imaging modality, including the noise characteristics of the electron source, the conical shape of the beam, and 3D scanning. Simulated STEM images of The electron paths in a cross-section of the substrate system consisting of 300 nm PMMA on Si (with a beam energy of 10 keV), generated by the CASINO software, are shown in Fig. 1. The Monte Carlo simulation provides not only the electron paths, but also the energy distribution in the resist (and substrate), i.e., the PSF to be derived. The Presentation of CASINO v3.2 STEM features is published in the journal Microscopy and Microanalysis, Volume 16, Issue 6, Pages 795-804, 2010. 2007-07-04 . User manual of the current version of CASINO is published in the journal Scanning, Volume 29, Issue 3, Pages 92-101, 2007. CASINO V2.42 - A Fast and Easy-to-use Modeling Tool for Scanning Electron Microscopy and Microanalysis Users The CASINO acronym has been derived from the words "monte CArlo SImulation of electroN trajectory in sOlids". This program is a Monte Carlo simulation of electron trajectory in solid specially designed for low beam interaction in a bulk and thin foil. This complex single scattering Monte Carlo program is specifically designed for low energy beam interaction and can be used to generate many of

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